Influence of Surface Roughness on Results of XPS Measurements
نویسندگان
چکیده
A concise overview of methods estimating the effect of surface roughness on results of XPS measurements is given. Tilt-angle histogram method (THM), straight-line approximation (SLA) and Monte Carlo (MC) simulations are considered. An application of such methods is described in detail in the case of flat and artificially corrugated silicon surfaces.
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